Title :
A test pattern for three-dimensional latch-up analysis
Author :
De Munari, Ilaria ; Menozzi, Roberto ; Davoli, Massimo ; Fantini, Fausto
Author_Institution :
Dipartimento di Ingegneria dell´´Inf., Parma Univ., Italy
Abstract :
By means of both cross-section and layout two-dimensional (2D) numerical simulations, three-dimensional (3D) latch-up interactions are demonstrated to significantly influence the latch-up behavior of a typical CMOS structure. A 3D latch-up test pattern is designed to allow the experimental study of such effects. The first measurement results show complex behaviors that can be overlooked if common 2D test patterns are used
Keywords :
CMOS integrated circuits; circuit layout; integrated circuit testing; 2D numerical simulations; CMOS structure; complex behaviors; cross-section simulation; layout simulation; test patterns; three-dimensional latch-up analysis; CMOS digital integrated circuits; CMOS process; CMOS technology; Circuit simulation; Circuit testing; MOSFET circuits; Numerical simulation; Pattern analysis; Physics; Shift registers;
Conference_Titel :
Microelectronic Test Structures, 1993. ICMTS 1993. Proceedings of the 1993 International Conference on
Conference_Location :
Sitges
Print_ISBN :
0-7803-0857-3
DOI :
10.1109/ICMTS.1993.292886
