Title :
1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023)
Abstract :
The following topics were dealt with: factory design and management; equipment; environment safety and health; automation and information systems; ultraclean technology and yield enhancement; process and materials optimization
Keywords :
clean rooms; integrated circuit manufacture; process control; semiconductor device manufacture; automation; environment safety; equipment; factory design; health; information systems; management; materials optimization; process optimization; semiconductor manufacturing; ultraclean technology; yield enhancement;
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1997 IEEE International Symposium on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3752-2
DOI :
10.1109/ISSM.1997.664475
