Title :
A new class of tunable RF MEMS inductors
Author :
Zine-El-Abidine, Imed ; Okoniewski, Michal ; McRory, John G.
Abstract :
In this paper, we present results from our research on tunable inductors. The tunability is achieved with the use of thermal actuators that control spacing between main and secondary inductor.
Keywords :
inductors; micromechanical devices; microwave devices; tuning; main inductor; secondary inductor; spacing control; thermal actuators; tunable RF MEMS inductors; Actuators; Inductance; Inductors; Micromechanical devices; Q factor; Radio frequency; Radiofrequency microelectromechanical systems; Substrates; Tunable circuits and devices; Voltage-controlled oscillators;
Conference_Titel :
MEMS, NANO and Smart Systems, 2003. Proceedings. International Conference on
Print_ISBN :
0-7695-1947-4
DOI :
10.1109/ICMENS.2003.1221976
