DocumentCode :
1884918
Title :
Three-dimensional square spiral photonic crystal nanostructures by glancing angle deposition
Author :
Kennedy, S.R. ; Jensen, M.O. ; Brett, M.J.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Alberta, Edmonton, Alta., Canada
fYear :
2003
fDate :
20-23 July 2003
Firstpage :
165
Lastpage :
171
Abstract :
We demonstrate the fabrication of a three-dimensional photonic band gap nanostructure using the unique Glancing Angle Deposition (GLAD) thin film technique. This innovative photonic structure is based on a tetragonal, square spiral symmetry found in FCC and diamond lattices and can be implemented in a virtual single-step fabrication process using GLAD. A highly porous film with engineered nanostructure results from the implementation of advanced substrate motion during the deposition, and three-dimensional periodicity required for a photonic crystal can be obtained when a square spiral staircase is fabricated on a tetragonally seeded substrate. We present successful fabrication of three-dimensional square spiral structures along with some examples of the unique capabilities of these nanostructured thin films.
Keywords :
elemental semiconductors; nanoporous materials; nanotechnology; photonic band gap; photonic crystals; semiconductor growth; semiconductor thin films; silicon; vapour deposition; glancing angle deposition; photonic crystal; photonic structure; porous thin films; square spiral symmetry; tetragonally seeded substrate; three-dimensional photonic band gap nanostructure; FCC; Fabrication; Lattices; Nanostructures; Photonic band gap; Photonic crystals; Spirals; Sputtering; Substrates; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
MEMS, NANO and Smart Systems, 2003. Proceedings. International Conference on
Print_ISBN :
0-7695-1947-4
Type :
conf
DOI :
10.1109/ICMENS.2003.1221987
Filename :
1221987
Link To Document :
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