Readout and Control Electronics for a Microelectromechanical Gyroscope

Author

Saukoski, Mikko ; Aaltonen, Lasse ; Salo, Teemu ; Halonen, Kari

Author_Institution

Helsinki Univ. of Technol.

fYear

2006

fDate

24-27 April 2006

Firstpage

1741

Lastpage

1746

Abstract

In this paper, the system-level implementation of readout and control electronics for a microelectromechanical angular velocity sensor will be presented. The sensor element for which the electronics is designed is a bulk micromachined silicon device with electrostatic detection and excitation. The electronics is divided into two parts, analog and digital. Analog electronics is implemented with a 0.7 mum CMOS process that offers high voltage devices and precision analog components. Digital signal processing is implemented with a field-programmable gate array chip. One of the most important system-level nonidealities, the zero-rate output, is analysed, paying attention to its effects on the electronics design. The implemented plusmn100deg/s angular velocity sensor achieves 0.053deg/s/radicHz measured spot noise and 49.9 dB signal-to-noise ratio over the 36 Hz bandwidth, with plusmn4% zero-rate output stability over the temperature range from -40 to +85 degC

Keywords

CMOS analogue integrated circuits; angular velocity measurement; field programmable gate arrays; gyroscopes; microsensors; readout electronics; -40 to 85 C; 0.7 micron; 36 Hz; CMOS process; analog electronics; bulk micromachined silicon device; control electronics; digital signal processing; electrostatic detection; electrostatic excitation; field-programmable gate array chip; microelectromechanical angular velocity sensor; microelectromechanical gyroscope; readout electronics; Angular velocity; Angular velocity control; CMOS process; Control systems; Electrostatics; Gyroscopes; Sensor systems; Signal to noise ratio; Silicon devices; Temperature sensors; CMOS integrated circuit; angular velocity sensor; capacitive micromechanical sensor; vibratory gyroscope; zero-rate output;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 2006. IMTC 2006. Proceedings of the IEEE

Conference_Location

Sorrento

ISSN

1091-5281

Print_ISBN

0-7803-9359-7

Electronic_ISBN

1091-5281

Type

conf

DOI

10.1109/IMTC.2006.328223

Filename

4124648