Title :
Modular metrology tools for productivity enhancement in wafer fabs
Author :
Schneider, Claus ; Pfitzner, Lothar ; Ryssel, Heiner
Author_Institution :
Fraunhofer Inst. of Integrated Circuits, Erlangen, Germany
Abstract :
Integrated metrology helps to reduce costs by decreasing the number of monitor wafers and by reducing the risk of wafer loss. For these reasons, there is an increasing demand for solutions which help to interface process control tools to manufacturing equipment in a cost-effective way. In this paper different measurement strategies are compared. A modular design of metrology tools is proposed enabling equipment vendors and sensor manufacturers to fast and easily integrate various metrology tools
Keywords :
cluster tools; computer integrated manufacturing; costing; integrated circuit manufacture; integrated circuit measurement; process control; production control; sensors; IC fabrication lines; break-even analysis; cluster tools; costs reduction; in situ metrology; integrated metrology; manufacturing equipment; measurement strategies; modular metrology tools; monitoring strategies; process control tools; production control; productivity enhancement; risk of wafer loss; sensor bus standard; wafer fabs; Continuous production; Costs; Manufacturing processes; Metrology; Monitoring; Process control; Productivity; Pulp manufacturing; Qualifications; Semiconductor device manufacture;
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1997 IEEE International Symposium on
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-3752-2
DOI :
10.1109/ISSM.1997.664498
