Lateral MEMS-type field-emission electron source

Author

Grzebyk, Tomasz ; Szyszka, Piotr ; Gorecka-Drzazga, Anna ; Dziuban, Jan A.

Author_Institution

Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland

fYear

2015

fDate

13-17 July 2015

Firstpage

198

Lastpage

199

Abstract

The paper describes a MEMS-type field emission electron source fabricated as a planar silicon structure bonded to a glass substrate. The source consists of a carbon nanotube cathode, beam formation electrodes and vacuum housing; all made in uniform technological process. Complete fabrication process of the test structures has been successfully elaborated and implemented. Emission properties obtained for the 2-, 3- and 4-electrode configurations have been reported. Possibility of generation of a focused electron beam, as well as gas ionization have been investigated.

Keywords

carbon nanotubes; cathodes; electron field emission; micromechanical devices; MEMS-type field emission electron source; beam formation electrodes; carbon nanotube cathode; emission properties; focused electron beam generation; gas ionization; glass substrate; planar silicon structure; vacuum housing; Cathodes; Electron sources; Glass; Nanoelectronics; Silicon; Substrates; MEMS; field emission; vacuum housing;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference (IVNC), 2015 28th International

Conference_Location

Guangzhou

Print_ISBN

978-1-4673-9356-0

Type

conf

DOI

10.1109/IVNC.2015.7225581

Filename

7225581