High frequency series resonance and surface wave sustained discharges

Summary form only given, as follows. The typical parallel plate RF discharge relies on capacitive coupling in sustaining discharges. At HF the natural resonances and normal modes in an unmagnetized plasma slab can be used to resonantly sustain plasma discharges. These resonantly sustained plasmas have many features which distinguish them from the conventional capacitive discharge. These distinguishing features including scaling laws, plasma impedance, minimum operating voltages, and wave structure will be discussed. In addition, the stability of these discharges will be verified and an observed transition in the heating mechanism and EEDG´s which is brought on by varying the neutral gas pressure will be demonstrated. Experimental results are based on PIC-MCC simulation in one and two dimensions and will be compared with theory where possible.