Integrated force arrays

Author

Bobbio, S.M. ; Kellam, Mark D. ; Dudley, Bruce W. ; Goodwin-johansson, Scott ; Jones, Susan K. ; Jacobson, James D. ; Tranjan, Farid M. ; DuBois, Thomas D.

Author_Institution

Dept. of Electr. Eng., North Carolina Univ., Charlotte, NC, USA

fYear

1993

fDate

7-10 Feb 1993

Firstpage

149

Lastpage

154

Abstract

Integrated force arrays (IFAs), which are flexible metallized membranes that can be patterned using the techniques of VLSI electronics and that undergo substantial deformation when voltage is applied, have been developed. They may be configured as macroscopic actuators or used in highly articulated systems of great complexity. The theory of operation, the methods of construction, and the observational results for IFA test structures are presented

Keywords

VLSI; electric actuators; electrostatic devices; mechatronics; membranes; micromechanical devices; 1D motion; VLSI; artificial muscle; electrostatic force; flexible metallized membranes; highly articulated systems; integrated force arrays; macroscopic actuators; methods of construction; operation; patterned; test structures; voltage controlled muscle; Actuators; Biomembranes; Control systems; Electrostatics; Microelectronics; Microscopy; Optical arrays; Optical control; Polyimides; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.

Conference_Location

Fort Lauderdale, FL

Print_ISBN

0-7803-0957-X

Type

conf

DOI

10.1109/MEMSYS.1993.296931

Filename

296931