Environmental effects on the acoustic behavior of a screen-protected MEMS pressure sensor

Author

Gradolph, Christian ; Müller, Gerhard ; Friedberger, Alois ; Wilde, Jürgen

Author_Institution

Electron. & Syst. Integration, Munich

fYear

2008

fDate

26-29 Oct. 2008

Firstpage

86

Lastpage

89

Abstract

We investigate the acoustic behavior of a screen-protected MEMS pressure sensor in particle-contaminated environments. An acoustic model of the sensor housing taking into account the number of openings is derived and verified with microphone measurements. It is shown that the real viscous resistance is more than two times higher than theoretically predicted by the Poiseuille flow model. Thus, a realistic resistance is calculated and inserted into the model, which subsequently describes the acoustic characteristics of the pressure sensor in dependence of the degree of plugging correctly.

Keywords

Poiseuille flow; microphones; microsensors; pressure measurement; pressure sensors; MEMS pressure sensor; Poiseuille flow model; acoustic behavior; environmental effects; microphone measurements; particle-contaminated environments; screen-protected sensor; sensor housing; Acoustic measurements; Acoustic sensors; Blades; Contamination; Magnetic sensors; Micromechanical devices; Microphones; Pollution measurement; Sensor phenomena and characterization; Sensor systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2008 IEEE

Conference_Location

Lecce

ISSN

1930-0395

Print_ISBN

978-1-4244-2580-8

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2008.4716389

Filename

4716389