DocumentCode :
1893164
Title :
MEMS-based compact FT-spectrometers - a platform for spectroscopic mid-infrared sensors
Author :
Kraft, Martin ; Kenda, Andreas ; Sandner, Thilo ; Schenk, Harald
Author_Institution :
Carinthian Tech Res. AG, Villach
fYear :
2008
fDate :
26-29 Oct. 2008
Firstpage :
130
Lastpage :
133
Abstract :
Novel low-voltage driven translational MEMS micro-mirror components are used to build a fully portable Fourier-Transform spectrometer. Applying nearly inertia-less MEMS devices to modulate the IR light allows building highly compact spectrometers with sub-millisecond scan times that are immune to shock and vibrations. Compact, energy efficient and robust, MEMS-based spectrometers can thus act as transducers for spectroscopic IR sensors deployable in the field. The devices shown can be used to qualitatively and quantitatively measure absorbance and/or emission spectra, even of transient signals and in real time, over a wide spectral range. This allows making full use of the inherent multi-analyte detection capabilities of spectroscopic sensors, giving this spectroscopy platform a significant advantage over single-wavelength IR sensors. When combined with already available fibre-optic sensor probes, the resulting sensors could open new application fields for smart sensors.
Keywords :
Fourier transform spectrometers; infrared spectrometers; light absorption; luminescence; micromechanical devices; micromirrors; compact FT-spectrometers; emission spectra; fibre-optic sensor probes; inertia-less MEMS devices; light absorbance measurement; low voltage driven translational MEMS micro-mirror; portable Fourier transform spectrometer; smart sensors; spectroscopic midinfrared sensors; Electric shock; Energy efficiency; Infrared sensors; Intelligent sensors; Microelectromechanical devices; Micromechanical devices; Optical modulation; Robustness; Spectroscopy; Transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2008 IEEE
Conference_Location :
Lecce
ISSN :
1930-0395
Print_ISBN :
978-1-4244-2580-8
Electronic_ISBN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2008.4716400
Filename :
4716400
Link To Document :
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