DocumentCode :
189353
Title :
Pt/WO3 microsensor grown by cold wall reactor Aerosol Assisted Chemical Vapor Deposition for C6H6 and NO2 detection
Author :
Annanouch, F.E. ; Haddi, Z. ; Llobet, E. ; Vallejos, S.
Author_Institution :
Dept. d´Eng. Electron., Univ. Rovira i Virgili, Tarragona, Spain
fYear :
2014
fDate :
2-5 Nov. 2014
Firstpage :
58
Lastpage :
61
Abstract :
Aerosol Assisted Chemical Vapor Deposition (AACVD) induced via localized heating of the gas sensor shows high flexibility, low cost and capability for the direct synthesis of low-dimensional metal oxide nanostructures in a wide scale of substrates. In this work, we report for the first time the successful co-deposition of tungsten trioxide nanowires decorated with Pt nanoparticles (Pt/WO3) in a single step, via AACVD method employing the self-heating capability of MEMS transducer platforms. E-SEM and XRD analysis have been used to investigate the morphology and the composition of the nanostructures grown. The fabricated gas microsensors have been tested toward different concentration of NO2 and C6H6. In comparison with our previous work, these new results show a clear improvement in the synthesis of the nanostructures, a highly enhanced sensitivity towards small concentrations of benzene, and good sensitivity and selectivity toward NO2.
Keywords :
CVD coatings; X-ray diffraction; aerosols; chemical variables measurement; gas sensors; microfabrication; microsensors; nanoparticles; nanosensors; nanowires; nitrogen compounds; organic compounds; platinum; scanning electron microscopy; transducers; tungsten compounds; AACVD method; C6H6; E-SEM analysis; MEMS transducer; NO2; Pt-WO3; XRD analysis; cold wall reactor aerosol assisted chemical vapor deposition; gas microsensor fabrication; localized heating; low-dimensional metal oxide nanostructures synthesis; nanoparticles; nanostructure synthesis; nanostructures composition; nanostructures morphology; self-heating capability; tungsten trioxide nanowires co-deposition; Aerosols; Gas detectors; Heating; Inductors; Nanowires; Temperature sensors; AACVD; cold wall reactor; gas sensors; low dimensional metal oxide nanostructure; self-heating;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
SENSORS, 2014 IEEE
Conference_Location :
Valencia
Type :
conf
DOI :
10.1109/ICSENS.2014.6984932
Filename :
6984932
Link To Document :
بازگشت