A wide-range frequency tunable SMR-CMOS oscillator for gas sensing

Author

TaePyeong Kim ; Sunjae Lim ; Sanghun Lee ; Duho Kim ; Al-Naimi, Farah ; Helfenstein, Patrick ; Spain, Malcolm ; Si Hoon Lee ; Rughoobur, Girish ; Garcia-Gancedo, Luis ; Flewitt, Andrew J. ; Sang-Hyun Lee

Author_Institution

Samsung Electron., Suwon, South Korea

fYear

2014

fDate

2-5 Nov. 2014

Firstpage

74

Lastpage

77

Abstract

Precise-frequency tunability over a wide-range plays an important role in the SMR (solidly mounted resonators) CMOS oscillator circuit. Although commercially available network analyzers have been the standard for highly sensitive mass sensing using SMR, it is not possible to miniaturize it for mobile sensor. In this work, the wide-range of resonance frequency is tuned by changing the number of inverter chains. The effect of inverter chains for the device sensitivity is also investigated. We also show capacitors used for starting a resonance play an important role in the device sensitivity. We believe this technique will be an essential platform for one-chip SMR-CMOS gas sensor having different resonance frequencies due to the selection of piezoelectric materials or the process variation during the fabrication.

Keywords

CMOS integrated circuits; gas sensors; oscillators; piezoelectric materials; gas sensing; inverter chains; one-chip SMR-CMOS gas sensor; piezoelectric materials; resonance frequency; solidly mounted resonators; wide-range frequency tunable SMR-CMOS oscillator; CMOS integrated circuits; Capacitors; Frequency measurement; Inverters; Oscillators; Resonant frequency; Sensitivity; CMOS; SMR; oscillator;

fLanguage

English

Publisher

ieee

Conference_Titel

SENSORS, 2014 IEEE

Conference_Location

Valencia

Type

conf

DOI

10.1109/ICSENS.2014.6984936

Filename

6984936