Title :
A capacitive biosensor based on ultrathin Si membranes
Author :
Tsouti, V. ; Goustouridis, D. ; Chatzandroulis, S. ; Normand, P. ; Andreakou, P. ; Ioannou, M. ; Kafetzopoulos, D. ; Boutopoulos, C. ; Zergioti, I. ; Tsoukalas, D. ; Hue, J. ; Rousier, R.
Author_Institution :
Inst. of Microelectron., NCSR Demokritos, Athens
Abstract :
A biosensor which takes advantage of surface stress changes during biological interactions and is able to translate them into a capacitive signal is presented. The sensor consists of an ultrathin silicon membrane on which receptor molecules are immobilized. During biomolecular interactions, the surface stress changes and the membrane deflects resulting in a change in device capacitance. The biosensor is part of a 16 times 16 array thus allowing for the making of larger assays with the concurrent sensing of multiple biological targets. First results using the biotin-steptavidin system are presented.
Keywords :
biomembranes; biosensors; capacitive sensors; silicon; Si; biomolecular interactions; biotin-steptavidin system; capacitive biosensor; surface stress change; ultrathin membranes; Biomembranes; Biosensors; Capacitive sensors; Capacitors; Electrodes; Optical noise; Sensor arrays; Sensor phenomena and characterization; Silicon; Tensile stress;
Conference_Titel :
Sensors, 2008 IEEE
Conference_Location :
Lecce
Print_ISBN :
978-1-4244-2580-8
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2008.4716421
