A new method in the gas identification by using MOS gas sensor based on the temperature-programmed technique

In this paper, a novel method in the gas identification by using WO₃ gas sensor based on the temperature-programmed modulation is reported. This method allows us to be capable of dynamically obtaining the temperature-dependent electrical conductivity (TEC) spectra in different atmospheres. In terms of the TEC of the WO₃, a rigorous model for extracting the feature parameters is presented here, which are associated with the gas adsorption/desorption and defect reaction mechanisms, from the differential curve d{[lnσT^3/2]}/dT-T. According to the feature parameters, we can clearly figure out the gas species.