DocumentCode
189595
Title
Introduction of a general model for the resonance parameters of fluid sensors and validation with recent sensor setups
Author
Heinisch, Martin ; Jakoby, Bernhard ; Voglhuber-Brunnmaier, Thomas ; Dufour, Isabelle
Author_Institution
Inst. f. Microelectron. & Microsensors, Johannes Kepler Univ., Linz, Austria
fYear
2014
fDate
2-5 Nov. 2014
Firstpage
602
Lastpage
605
Abstract
A comprehensive investigation and comparison of recently published resonant viscosity and mass density sensors are presented. This investigation is based on the application of a generalized model and a subsequent interpretation of results. The devised model relates the measured resonant parameters (resonance frequency and quality factor) of the frequency response to the physical parameters of the fluid (mass density, shear viscosity and temperature). The presented model is applied to eight different resonant sensors in a frequency range from 400 Hz to 3.7 MHz and quality factors between 0.7 to 500.
Keywords
Q-factor; density measurement; frequency response; mass measurement; viscosity measurement; fluid temperature; frequency 400 Hz to 3.7 MHz; frequency response; generalized model; mass density sensors; quality factor; resonance frequency; resonant viscosity sensors; shear viscosity; Resonant frequency; Temperature; Temperature dependence; Temperature measurement; Temperature sensors; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
SENSORS, 2014 IEEE
Conference_Location
Valencia
Type
conf
DOI
10.1109/ICSENS.2014.6985070
Filename
6985070
Link To Document