Electrostatic stabilization of thermal variation in quality factor using anchor loss modulation

Author

Jie Han ; Zotov, Sergei A. ; Simon, Brenton R. ; Prikhodko, Igor P. ; Sharma, Gunjana ; Trusov, Alexander A. ; Shkel, Andrei M.

Author_Institution

Microsyst. Lab., Univ. of California, Irvine, Irvine, CA, USA

fYear

2014

fDate

2-5 Nov. 2014

Firstpage

998

Lastpage

1001

Abstract

We report an ultra-low energy dissipation silicon MEMS tuning fork resonator with a Q-factor of over 2 million at 570 Hz, with the ability of Q-factor stabilization throughout a temperature range of over 100 °C. This stabilization approach relies on the controlling of energy dissipation through regulating the stiffness misbalance of the tuning fork resonator. Without Q-factor regulation, the resonator demonstrates a Q-factor with a 25% drift from 2.14 million to 2.67 million, over a temperature range from -40 °C to +60 °C. With implementation of the proposed stabilization method, the experimental characterization reveals a stable Q-factor of 2.14 million within 0.3% (+1σ) variation for an identical temperature range (-40 °C to +60 °C).

Keywords

Q-factor; electrostatics; losses; micromechanical resonators; silicon; thermal analysis; vibrations; Q-factor regulation; Q-factor stabilization throughout; anchor loss modulation; electrostatic stabilization; frequency 570 MHz; quality factor; stiffness misbalance; temperature 100 degC; temperature 40 degC to 60 degC; thermal variation; ultralow energy dissipation silicon MEMS tuning fork resonator; Q-factor; Resonant frequency; Temperature distribution; Temperature measurement; Temperature sensors; Tuning; Quality factor; electrostatic tuning; temperature self-sensing; thermal variation; tuning fork;

fLanguage

English

Publisher

ieee

Conference_Titel

SENSORS, 2014 IEEE

Conference_Location

Valencia

Type

conf

DOI

10.1109/ICSENS.2014.6985171

Filename

6985171