• DocumentCode
    1908194
  • Title

    DRAM Technologies For Today`s Market And Future DRAM Generations

  • Author

    Neumueller, W. ; Alsmeier, J. ; Bronner, G. ; Ishibashi, S. ; Klose, H.

  • Author_Institution
    Siemens
  • fYear
    1997
  • fDate
    22-24 September 1997
  • Firstpage
    49
  • Lastpage
    56
  • Keywords
    Capacitors; Computer aided manufacturing; Costs; Electronics industry; Logic; Manufacturing processes; Production; Random access memory; Semiconductor device manufacture; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1997. Proceeding of the 27th European
  • Print_ISBN
    2-86332-221-4
  • Type

    conf

  • DOI
    10.1109/ESSDERC.1997.194379
  • Filename
    1503309