DocumentCode
1908194
Title
DRAM Technologies For Today`s Market And Future DRAM Generations
Author
Neumueller, W. ; Alsmeier, J. ; Bronner, G. ; Ishibashi, S. ; Klose, H.
Author_Institution
Siemens
fYear
1997
fDate
22-24 September 1997
Firstpage
49
Lastpage
56
Keywords
Capacitors; Computer aided manufacturing; Costs; Electronics industry; Logic; Manufacturing processes; Production; Random access memory; Semiconductor device manufacture; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN
2-86332-221-4
Type
conf
DOI
10.1109/ESSDERC.1997.194379
Filename
1503309
Link To Document