DocumentCode
1908397
Title
Observation of low energy electron diffraction image and work function of ZrO/W(100) surface
Author
Miyamoto, N. ; Adachi, H. ; Nakane, H.
Author_Institution
Dept. of Electr. & Electron. Eng., Muroran Inst. of Technol., Japan
fYear
2003
fDate
7-11 July 2003
Firstpage
115
Lastpage
116
Abstract
In this paper, the relation between Zr included LEED (low energy electron diffraction) structure and the work function on a modeled ZrO/W surface was investigated.
Keywords
low energy electron diffraction; surface structure; tungsten; work function; zirconium compounds; Zr included LEED structure; ZrO-W; ZrO/W(100) surface; low energy electron diffraction image; work function; Cathodes; Diffraction; Heating; Scanning electron microscopy; Surface cleaning; Surface finishing; Surface treatment; Threshold voltage; Tungsten; Zirconium;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location
Osaka, Japan
Print_ISBN
4-8181-9515-4
Type
conf
DOI
10.1109/IVMC.2003.1223010
Filename
1223010
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