DocumentCode

1908540

Title

Optical litography, how far will it get us?

Author

Van den Hove, L.

Author_Institution

IMEC, Belgium

fYear

1997

fDate

22-24 September 1997

Firstpage

163

Lastpage

169

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1997. Proceeding of the 27th European

Print_ISBN

2-86332-221-4

Type

conf

DOI

10.1109/ESSDERC.1997.194392

Filename

1503322