Field emission from alligned carbon nanotubes grown on patterned oxide layers

Author

Satyanarayana, B.S. ; Wei, B.Q. ; Jung, Y. ; Ramanath, G. ; Ajayan, P.M.

Author_Institution

Rodel Nitta Co., Nara, Japan

fYear

2003

fDate

7-11 July 2003

Firstpage

213

Lastpage

214

Abstract

In this paper, we report field emission from carbon nanotubes/fibers selectively grown on patterned silicon dioxide, without a pre-deposited metal catalyst layer. The nanotubes were grown by the chemical vapour deposition (CVD) of xylene (C/sub 8/H/sub 10/), using ferrocene(Fe(C/sub 5/H/sub 5/)/sub 2/) as the catalyst precursor, on n/sup ++/ silicon substrate with an over layer of thermally grown oxide, at growth temperature of 800-900 /spl deg/C. The influence of the oxide thickness when varied 15nm to 100nm, on the field emission properties is reported.

Keywords

CVD coatings; carbon fibres; carbon nanotubes; electron field emission; 15 to 100 nm; 800 to 900 degC; C; CVD; Si; SiO/sub 2/; carbon fibers; carbon nanotubes; catalyst; chemical vapour deposition; ferrocene; field emission; metal catalyst layer; patterned oxide layers; silicon dioxide; silicon substrate; xylene; Anodes; Carbon dioxide; Carbon nanotubes; Chemical vapor deposition; Electron emission; Glass; Microelectronics; Silicon compounds; Substrates; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International

Conference_Location

Osaka, Japan

Print_ISBN

4-8181-9515-4

Type

conf

DOI

10.1109/IVMC.2003.1223059

Filename

1223059