Title :
Fabrication of carbon nanotubes array and its field emission property
Author :
Sato, H. ; Takegawa, H. ; Saito, Y. ; Yamaji, H. ; Miyake, H. ; Hiramatsu, K.
Author_Institution :
Dept. of Electr. & Electron. Eng., Mie Univ., Tsu, Japan
Abstract :
In this paper, we employed the PE-CVD and a lift-off process using silicon substrates. Field emission from the CNT array, which was fabricated by means of this technique, was investigated.
Keywords :
carbon nanotubes; field emitter arrays; nanotechnology; nanotube devices; plasma CVD; C; Si; carbon nanotubes array; field emission; plasma enhanced CVD; silicon substrates; Carbon nanotubes; Fabrication; Field emitter arrays; Iron; Plasma chemistry; Plasma displays; Plasma properties; Silicon; Substrates; Threshold voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1223062
