Title :
A 34 GHz fT Bipolar Process with High-Energy-Implanted Collector
Author :
Ponomarev, Y.V. ; Emons, C.H.H. ; van der Wel, W. ; van den Berg, M.A. ; Timmering, C.E. ; Janssen, A.C.L. ; Politiek, J.
Author_Institution :
Philips Research Laboratories, The Netherlands
fDate :
22-24 September 1997
Keywords :
Annealing; Crystalline materials; Epitaxial layers; Implants; Laboratories; Substrates; Temperature;
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
DOI :
10.1109/ESSDERC.1997.194452
