Title :
An Accurate In-Fixture Measurement Method for AlN Film Bulk Acoustic Resonators
Author :
Hang Xu ; Yanjie Su ; Hanlin Yang ; Dong Xu ; Yafei Zhang ; Da Chen ; Yijian Liu
Author_Institution :
Inst. of Micro/Nano Sci. & Technol., Shanghai Jiao Tong Univ., Shanghai, China
Abstract :
In this paper, a solid mounted FBAR working at 2.0 GHz was fabricated, which was intended for high sensitive molecular sensing. To measure the devices conveniently and accurately on the board, an in-fixture measurement method based on the de-embedded technique using the fixture model and the measured S-parameters is developed with high precision to get rid of the cumbrous probe station. The fixture was modeled accurately and the results were compared with that from the probe station. Optimized approaches have been developed with small deviations, enabling some gas or biochemical tests in real time.
Keywords :
III-V semiconductors; S-parameters; acoustic resonators; aluminium compounds; bulk acoustic wave devices; semiconductor device measurement; wide band gap semiconductors; AlN; S-parameters; biochemical tests; deembedded technique; film bulk acoustic resonators; frequency 2.0 GHz; gas tests; high sensitive molecular sensing; in-fixture measurement method; probe station; FBAR; accurate measurement; de-embedding; in-fixture; real-time;
Conference_Titel :
Information Science and Engineering (ISISE), 2012 International Symposium on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4673-5680-0
DOI :
10.1109/ISISE.2012.46