Title :
Slot-antenna-coupled microbolometers for far-infrared detection
Author :
Yasuoka, Y. ; Uchida, T. ; Kobayashi, H.
Author_Institution :
National Defense Academy, Japan
fDate :
22-24 September 1997
Keywords :
Bismuth; Bolometers; Electric resistance; Fabrication; Radiation detectors; Receiving antennas; Substrates; Temperature; Thermal conductivity; Thermal resistance;
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
DOI :
10.1109/ESSDERC.1997.194458