DocumentCode
1910682
Title
Physics and performances of accumulation-mode SOI p-MOSFET´s from low (77 K) to high (150-320°C) temperatures
Author
Flandre, D. ; Terao, A. ; Loo, T. ; Colinge, J.-P.
Author_Institution
Laboratoire de Microelectronique, Université Catholique de Louvain, Place du Levant 3, 1348 Louvain-la-Neuve Belgium; Senior Research Assistant of the National Fund for Scientific Research (FNRS), Belgium
fYear
1992
fDate
14-17 Sept. 1992
Firstpage
803
Lastpage
806
Abstract
A theoretical analysis of the physics of accumulation-mode SOI p-MOSFET´s is supported by new experimental data at room temperature, then extended to low (77 K) and high (150-320°C) temperature domains. The electrical performances of these devices under such temperature conditions are discussed and shown to be compatible with circuit requirements.
Keywords
Conductive films; Doping; Low voltage; MOSFET circuits; Microelectronics; Physics; Semiconductor films; Temperature measurement; Threshold voltage; Transconductance;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1992. ESSDERC '92. 22nd European
Conference_Location
Leuven, Belgium
Print_ISBN
0444894780
Type
conf
Filename
5435411
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