Title :
The concept of a high-brightness, miniaturized gas field ion source
Author :
Tondare, V.N. ; Hagen, C.W. ; Kruit, P.
Author_Institution :
Fac. of Appl. Sci., Delft Univ. of Technol., Netherlands
Abstract :
In this paper, we propose to miniaturize an argon (Ar) GFIS at micron or sub-micron scale. The source can be operated at room temperature and high pressure (100 mbar) and voltages below 140 Volts (i.e the minimum in the Paschen curve for Ar-gas) to avoid Ar gas discharges.
Keywords :
argon; brightness; ion sources; 100 mbar; 293 to 298 K; Ar; Ar gas discharges; argon; brightness; miniaturized gas field ion source; paschen curve; room temperature; voltages; Argon; Atomic measurements; Brightness; Current density; Electrostatics; Geometry; Ion sources; Lenses; Polarization; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1223106
