Title :
Measurement of thermal conductivity of thin and thick films by steady-state heat conduction
Author :
Shrestha, R. ; Choi, T.-Y. ; Chang, W.S.
Author_Institution :
Dept. of Mech. & Energy Eng., Univ. of North Texas, Denton, TX, USA
Abstract :
This paper describes novel glass micropipette thermal sensor fabricated in a cost-effective manner and thermal conductivity measurement of carbon nanotubes (CNT) thin film using the developed sensor. Various micrometer-sized sensors, which range from 2 μm to 30 μm, were produced and tested. The capability of the sensor in measuring thermal fluctuation at micro level with an accuracy of ±0.01°C is demonstrated. We have obtained reproducible thermal conductivity data using various micropipette temperature sensors. The average thermal conductivity of the CNT film at room temperature was determined at 73.4 W/m°C.
Keywords :
carbon nanotubes; microsensors; temperature sensors; thermal conductivity measurement; thin films; carbon nanotubes thin film; glass micropipette thermal sensor; micrometer-sized sensors; steady-state heat conduction; thermal conductivity measurement; thermal fluctuation; thick films; thin films; Conductivity; Conductivity measurement; Films; Temperature measurement; Temperature sensors; Thermal conductivity; CNT films; Thermal conductivity; micropipette;
Conference_Titel :
Semiconductor Thermal Measurement and Management Symposium (SEMI-THERM), 2012 28th Annual IEEE
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1110-6
Electronic_ISBN :
1065-2221
DOI :
10.1109/STHERM.2012.6188843
