A Detailed Study of Electron Mobility Degradation by Surface Scattering in ULSI MOSFET´s

Author

Mazzoni, G. ; Lacaita, A.L. ; Perron, L.M. ; Pirovano, A.

Author_Institution

Politecnico di Milano, Italy

fYear

1998

fDate

8-10 Sept. 1998

Firstpage

328

Lastpage

331

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location

Bordeaux, France

Print_ISBN

2-86332-234-6

Type

Filename

1503555

Link To Document