DocumentCode

1917232

Title

Breakdown and Recovery of Thin Gate Oxides

Author

Bearda, Twan ; Mertens, Paul W. ; Heyns, Marc M. ; Woerlee, Pierre ; Wallinga, Hans

Author_Institution

IMEC, Leuven, Belgium

fYear

2000

fDate

11-13 September 2000

Firstpage

116

Lastpage

119

Keywords

Breakdown voltage; Carbon capture and storage; Conductivity; Electric breakdown; Frequency; Impedance; Noise level; Stress; Testing; Time measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2000. Proceeding of the 30th European

Print_ISBN

2-86332-248-6

Type

conf

DOI

10.1109/ESSDERC.2000.194728

Filename

1503658