Dielectric Phase Shifter Based on Piezotunable Double-Link Impedance-Step Filter

Author

Poplavko, Y. ; Pashkov, V. ; Molchanov, V. ; Shmigin, D. ; Yeremenko, A.

Author_Institution

Nat. Tech. Univ. of Ukraine, Kiev

fYear

2007

fDate

10-14 Sept. 2007

Firstpage

445

Lastpage

447

Abstract

Possible alternative of low loss and highly tunable MEMS phase shifter is discussed. Dielectric or metallic parts of device should have the piezo-dirigible air gap between them. Important is to provide a strong perturbation in electromagnetic field in the region influenced by the mechanical control. Energy distribution within the device is controlled by piezoelectric actuator, and can be described as a change in effective dielectric permittivity (epsiv_eff). Some of highly tunable piezoelectric RF MEMS devices are realized experimentally.

Keywords

crystal filters; micromechanical devices; microwave filters; microwave phase shifters; permittivity; piezoelectric actuators; MEMS phase shifter; dielectric phase shifter; effective dielectric permittivity; electromagnetic field perturbation; energy distribution; highly tunable piezoelectric RF MEMS devices; mechanical control; piezo-dirigible air gap; piezoelectric actuator; piezotunable double-link impedance-step filter; Dielectric devices; Electromagnetic fields; Filters; Impedance; Micromechanical devices; Permittivity; Phase shifters; Piezoelectric actuators; Piezoelectric devices; Radiofrequency microelectromechanical systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave & Telecommunication Technology, 2007. CriMiCo 2007. 17th International Crimean Conference

Conference_Location

Crimea

Print_ISBN

978-966-335-012-7

Type

conf

DOI

10.1109/CRMICO.2007.4368801

Filename

4368801