Title :
Inverse Modelling of Trapped Charge in Hot-Carrier Stressed nMOSFET
Author :
Duane, R. ; Concannon, A. ; McCarthy, D. ; Mathewson, A.
Author_Institution :
National Microelectronics Research Centre, Cork, Ireland
fDate :
11-13 September 2000
Keywords :
Charge pumps; Current measurement; Doping profiles; Hot carriers; Interface states; Inverse problems; MOSFET circuits; Numerical simulation; Semiconductor process modeling; Stress;
Conference_Titel :
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Print_ISBN :
2-86332-248-6
DOI :
10.1109/ESSDERC.2000.194791