Development of vertical planar coil inductors using plastic deformation magnetic assembly (PDMA)

Author

Jun Zou ; Nickel, J.G. ; Trainor, D. ; Chang Liu ; Schutt-Aine, J.E.

Author_Institution

Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA

Volume

1

fYear

2001

fDate

20-24 May 2001

Firstpage

193

Abstract

This paper presents the results of the development of a vertical planar coil inductor. The planar coil inductor is first fabricated on a silicon substrate and then assembled to the vertical position by using a novel 3-dimensional bath-scale self-assembly process called Plastic Deformation Magnetic Assembly (PDMA). Inductors of different dimensions are fabricated and tested. The S-parameters of the inductors before and after PDMA are measured and compared, demonstrating superior performance due to reduced substrate effects and also increased substrate space savings for the vertical planar coil inductors.

Keywords

S-parameters; UHF integrated circuits; coils; inductors; integrated circuit technology; microassembling; plastic deformation; 3D bath-scale self-assembly process; RFIC; S-parameters; Si; Si substrate; plastic deformation magnetic assembly; substrate effects reduction; vertical planar coil inductors; Assembly; Coils; Dielectric losses; Dielectric substrates; Inductors; Magnetic levitation; Magnetic materials; Magnetic separation; Plastics; Structural beams;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2001 IEEE MTT-S International

Conference_Location

Phoenix, AZ, USA

ISSN

0149-645X

Print_ISBN

0-7803-6538-0

Type

conf

DOI

10.1109/MWSYM.2001.966869

Filename

966869