Title :
Study of Self Heating Effects on Future SOI Devices Operation
Author :
Yachou, Driss ; Gautier, Jacques
Author_Institution :
LETI (CEA - Technologies Avancées) DMEL - CENG, BP85X, 38054 Grenoble Cedex 9, France. Fax: (33)76885183
Abstract :
In this work we give a thermal analytical model that is suitable for taking into account the lattice temperature in parameters extraction. This thermal model is used to estimate the self heating effects on future SOI devices operation.
Keywords :
Analytical models; Heating; Lattices; Parameter extraction; Power transmission lines; Semiconductor films; Silicon; Temperature; Thermal conductivity; Thermal resistance;
Conference_Titel :
Solid State Device Research Conference, 1994. ESSDERC '94. 24th European
Conference_Location :
Edinburgh, Scotland
