DocumentCode

1922232

Title

Lateral Trench Gate Super-Junction SOI-LDMOSFETs with Low On-Resistance

Author

Park, Jong Mun ; Klima, Robert ; Selberherr, Siegfried

Author_Institution

Institute for Microelectronics, TU Vienna, Austria

fYear

2002

fDate

24-26 September 2002

Firstpage

283

Lastpage

286

Keywords

Automotive engineering; Degradation; Doping; Immune system; MOSFETs; Microelectronics; Numerical simulation; Silicon on insulator technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2002. Proceeding of the 32nd European

Print_ISBN

88-900847-8-2

Type

conf

DOI

10.1109/ESSDERC.2002.194924

Filename

1503854