Title :
Anodic alumina and titania MIM capacitors - an experimental comparative study
Author :
Kannadassan, D. ; Karthik, R. ; Mallick, P.S. ; Baghini, Maryam Shojaei
Author_Institution :
VIT Univ., Vellore, India
Abstract :
This paper presents the fabrication and comparative study of barrier type Al2O3 & TiO2 Metal-Insulator-Metal (MIM) capacitor using anodic oxidation technique. With high capacitance density (> 5fF/μm2) and low leakage current density (10nA/cm2), both the capacitors show excellent performance and meet the ITRS recommendations for the year 2015. With a detailed study on frequency dependence of capacitance and conduction mechanisms, the evaluation of capacitor performance is done for the RF and Mixed signal applications. The barrier type anodic oxides are suggested as a dielectric material for high performance MIM capacitors.
Keywords :
MIM devices; alumina; anodisation; capacitance; capacitors; current density; dielectric materials; leakage currents; mixed analogue-digital integrated circuits; performance evaluation; radiofrequency integrated circuits; titanium compounds; Al2O3; ITRS recommendations; RF integrated circuit; TiO2; anodic alumina; anodic oxidation technique; barrier type anodic oxides; barrier type metal-insulator-metal capacitor; capacitance density; capacitance mechanisms; capacitor performance evaluation; conduction mechanisms; dielectric material; frequency dependence; high performance MIM capacitors; leakage current density; mixed signal integrated circuit; titania MIM capacitors; Artificial intelligence; Capacitors; High K dielectric materials; Performance evaluation; Reliability; Transistors; Alumina; Anodization; Crystalline; High-k; MIM Capacitor; Titania;
Conference_Titel :
Emerging Trends in VLSI, Embedded System, Nano Electronics and Telecommunication System (ICEVENT), 2013 International Conference on
Conference_Location :
Tiruvannamalai
Print_ISBN :
978-1-4673-5300-7
DOI :
10.1109/ICEVENT.2013.6496586
