Title :
Determination of scanning parameters in intermittent contact operation mode AFM
Author :
Oprea, I. ; Gavrila, R. ; Dinescu, A. ; Oprica, R.
Author_Institution :
R&D Inst. for Microtechnology, Bucharest, Romania
Abstract :
Intermittent-contact mode Atomic Force Microscopy (Ic-AFM) is a powerful tool especially dedicated to soft samples imaging. Experimental determinations of parameters required for proper Ic-AFM operation have been performed by studying the system response to exciting oscillation and the probe-sample approach curve in near resonance conditions for a particular sample
Keywords :
atomic force microscopy; IcAFM; atomic force microscopy; intermittent contact mode; scanning parameters; soft sample imaging; Atomic force microscopy; Biological materials; Elasticity; Material properties; Probes; Research and development; Resonance; Resonant frequency; Surface morphology; Surface topography;
Conference_Titel :
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-6666-2
DOI :
10.1109/SMICND.2001.967418
