Design and manufacturing of a multichannel microprobe for electrical activity recording of neural cells

Author

Moldovan, Carmen ; Ilian, V. ; Iosub, Rodica ; Modreanu, M. ; Dinoiu, Ioana ; Firtat, B.

Author_Institution

Dept. of Multidisciplinary Res., Nat. Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania

Volume

1

fYear

2001

fDate

2001

Firstpage

265

Abstract

The extracellular potential simultaneous recording permits the investigation of the central nervous activity. The paper presents the design and manufacturing steps of an 8-channel microprobe for recording the electrical activity of neural cells and tissues integrated on the same chip with the electronics. The specific fabrication processes of the integrated microprobe are presented. An implantable neural microprobe is developed to enable the correlation between electrical activity in the human nervous system and external psycho-electrical stimuli. The electronics accomplish the separation and reduction of the biological noise recording

Keywords

bioelectric phenomena; biological techniques; cellular biophysics; etching; micromachining; neurophysiology; probes; anisotropic etching; biological noise recording; central nervous activity investigation; external psychoelectrical stimuli; fabrication processes; human nervous system; implantable neural microprobe; manufacturing steps; multichannel microprobe; neural cells electrical activity; silicon micromachining; Anisotropic magnetoresistance; Boron; Electronic circuits; Etching; Extracellular; Humans; Manufacturing; Micromachining; Nervous system; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2001. CAS 2001 Proceedings. International

Conference_Location

Sinaia

Print_ISBN

0-7803-6666-2

Type

conf

DOI

10.1109/SMICND.2001.967460

Filename

967460