Title :
Influence of relative humidity on conductivity of fullerite film [humidity sensor applications]
Author :
Berdinsky, Lexander S. ; Krasnoshtanov, Sergey M.
Author_Institution :
Novosibirsk State Tech. Univ., Russia
Abstract :
The opportunity to use a fullerite film as a device sensitive to moisture content in environmental space is considered. We investigated, as a function of change of resistance with humidity, its usefulness for the preparation of small-sized integrated humidity sensors. Also, this research can be useful for the study of fullerite properties. The dependence of resistance on humidity is based on the whole complex of the phenomena, which arises at the penetration of moisture in a fullerite film.
Keywords :
electrical conductivity; fullerene compounds; fullerene devices; humidity sensors; moisture; film moisture penetration; fullerite film conductivity; fullerite properties; humidity dependent resistance; integrated humidity sensors; moisture content sensitive device; relative humidity; Conducting materials; Conductive films; Conductivity; Electrical resistance measurement; Gold; Humidity; Semiconductor films; Silicon; Thermal resistance; Voltage;
Conference_Titel :
Electron Devices and Materials, 2003. Proceedings. 4th Annual 2003 Siberian Russian Workshop on
Print_ISBN :
5-7782-0412-4
DOI :
10.1109/SREDM.2003.1224242
