Dimensional effects in modelling RF glow discharges

Summary form only given. The effects due to the difference between 1D and 2D models are presented in both kinetic and fluid models in order to illustrate the importance of the charged-particle transport along the radial direction. Electrons are shown to have a higher mean energy and ionization rate in the plasma bulk in the 2D kinetic model. The plasma sheath is smaller in the 2D kinetic model. The 2D three-moment fluid model shows that the electron mean energy is higher in the area close to the radial wall in which the maximum ionization rate occurs.