Title :
New high resistance magnetic sensors based on nanogranular Ag-Co ferromagnetic alloys
Author :
Arana, N. ; Etxeberria, J.A. ; Arana, S. ; Gracia, F.J. ; Castaño, E.
Author_Institution :
Centro de Estudios e Investigaciones Tecnicas de Gipuzkoa, San Sebastian, Spain
Abstract :
One of the most important problems in the development of thin film metallic sensors is to obtain a high resistance value. This paper presents the design, fabrication and test of new structures of contactless magnetic sensors based on high-sensitivity giant magnetoresistance. In order to obtain high resistive values, the samples have been patterned as meanders with circular and semicircular configurations. The physical principle of these sensors is the magnetoresistance measured in an Ag-Co alloy, which has been optimized to obtain a high sensitivity. The tests have been carried out using a measurement bench for circular shapes fabricated ad-hoc for the designed devices.
Keywords :
cobalt alloys; ferromagnetic materials; giant magnetoresistance; magnetic field measurement; magnetic sensors; microsensors; silver alloys; Ag-Co; Ag-Co ferromagnetic alloys; giant magnetoresistance; magnetic sensors; thin film metallic sensors; Fabrication; Giant magnetoresistance; Iron alloys; Magnetic sensors; Mechanical sensors; Ordinary magnetoresistance; Sensor phenomena and characterization; Substrates; Thermal resistance; Thin film sensors;
Conference_Titel :
Electron Devices, 2005 Spanish Conference on
Conference_Location :
Tarragona
Print_ISBN :
0-7803-8810-0
DOI :
10.1109/SCED.2005.1504520