Improved analytic model for glow discharge plasma

Summary form only given. A three-dimensional and totally self-consistent analytical model for glow discharge plasma has been developed. All the analytic expressions attained from the model completely satisfy the real boundary conditions and the governing equations, which consist of the continuity equations and transport equations of charged particles, Poisson´s equation, and the Maxwell equation. Using the mode index scheme, the model can be readily employed in a wide range of application. A systematic series of experiments has been carried out to verify the theoretical predictions, and good agreement was obtained.