Title :
The Effect of Ion-Irradiation and Rapid Thermal Annealing on TiSie and MoSie
Author :
Groberg, Leif ; Krontiras, Christos ; Saarilahti, Jaakko ; Suni, Ilkka
Author_Institution :
Technical Research Centre of Finland Semiconductor Laboratory, Otakaari 7 B, SF-02150 Espoo, Finland
Keywords :
Amorphous materials; Conductivity; Laboratories; Physics; Rapid thermal annealing; Semiconductor films; Silicides; Silicon; Sputtering; Temperature;
Conference_Titel :
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location :
Bologna, Italy
