DocumentCode :
1941334
Title :
Session 3: MEMS
Author :
Mita, Yoshio ; Yeric, Greg M.
Author_Institution :
University of Tokyo, Japan
fYear :
2012
fDate :
19-22 March 2012
Firstpage :
43
Lastpage :
44
Abstract :
Start of the above-titled section of the conference proceedings record.
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2012 IEEE International Conference on
Conference_Location :
San Diego, CA
ISSN :
1071-9032
Print_ISBN :
978-1-4673-1027-7
Type :
conf
DOI :
10.1109/ICMTS.2012.6190610
Filename :
6190610
Link To Document :
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