Title :
Calculation and Analysis of Temperature Field for Planar Motor Based on 3D FEM
Author :
Zhou Qing Sheng ; Huang Su Rong ; Zhang Qi
Author_Institution :
Autom. Dept., Shanghai Univ., Shanghai, China
Abstract :
For water cooling ultra-precision planar motor used for Lithography equipment, transient and steady thermal analyses are effectiveness to predict the temperature distribution and requirement on the water cooling system. This paper investigates calculating the couple field of temperature field and fluid field of ultra-precision planar motor through 3D finite-element analysis (FEA). The analysis result provides foundation for improving motor performance, structural optimization as well as the design of cooling system.
Keywords :
cooling; electric motors; finite element analysis; lithography; temperature distribution; thermal analysis; 3D FEM; FEA; cooling system; lithography equipment; steady thermal analyses; structural optimization; temperature distribution; temperature field analysis; transient analyses; water cooling ultra-precision planar motor; Coils; Coolants; Heat transfer; Planar motors; Temperature distribution; Thermal analysis; Finite Element Method; temperature field; ultra-precision planar motor;
Conference_Titel :
Digital Manufacturing and Automation (ICDMA), 2011 Second International Conference on
Conference_Location :
Zhangjiajie, Hunan
Print_ISBN :
978-1-4577-0755-1
Electronic_ISBN :
978-0-7695-4455-7
DOI :
10.1109/ICDMA.2011.74
