Title :
Study of micromachined tunable filter and its potential application to tunable laser
Author :
Chou, B.C.S. ; Lin, W.T. ; Chiou, J.C.
Author_Institution :
Precision Instrum. Dev. Center, Nat. Sci. Council, Hsinchu, Taiwan
Abstract :
There are a number of different ways to achieve tunability. Among these, MEMS technology offers a new approach to mechanically adjust the lasing cavity length to select the output wavelength. In this work, we report on the fabrication of a tunable Fabry-Perot filter based on the consideration of process and material compatibility when this filter structure is to be fabricated directly onto the VCSEL wafers as a tunable laser.
Keywords :
Fabry-Perot interferometers; electrostatic actuators; integrated optics; interference filters; laser tuning; micro-optics; micromachining; mirrors; surface emitting lasers; Fabry-Perot filter; Fabry-Perot interferometer; MEMS technology; SEM; VCSEL wafers; floating bridge structure; material compatibility; micromachined tunable filter; optical mirror; sharp resonant transmission peaks; tunable laser application; Bridge circuits; Chemical lasers; Electrodes; Fiber lasers; Laser applications; Laser theory; Mirrors; Optical filters; Tunable circuits and devices; Voltage;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-6738-3
DOI :
10.1109/CLEOPR.2001.967903
