Title :
A new class of thermal flow sensors using ΔT=0 as a control signal
Author :
Lammerink, T.S.J. ; Tas, N.R. ; Krijnen, G.J.M. ; Elwenspoek, M.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
In this paper we propose a new anemometer principle. Next to the known Constant Power Anemometry (CPA) and the Constant Temperature Anemometry (CTA), here the Temperature Balanced Anemometry (TBA) is presented. A compact overview of thermal flow sensor system concepts is given. The new concept has important consequences for simple flow sensor calibration. The proposed concept is investigated using experiments on conventional thermal flow sensors. A micro flow sensor is presented in combination with an example of simple electronic interfacing circuitry
Keywords :
anemometers; anemometry; calibration; flow measurement; microsensors; thermal analysis; anemometer principle; control signal; dual probe sensor; electronic interfacing circuitry; flow sensor calibration; micro flow sensor; temperature balanced anemometry; thermal flow sensors; thermal model; Fluid flow measurement; Power measurement; Power system modeling; Probes; Resistors; Sensor systems; Temperature measurement; Temperature sensors; Thermal sensors; Velocity measurement;
Conference_Titel :
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location :
Miyazaki
Print_ISBN :
0-7803-5273-4
DOI :
10.1109/MEMSYS.2000.838572
