Title :
Interconnect Heating by Pulsed DC
Author :
Roska, G. ; Mazuré, C.
Author_Institution :
Siemens AG, Semiconductor Division, Microelectronics, Otto-Hahn-Ring 6, D-8000 Mÿnchen 83, F. R. G.
Abstract :
The line heating and cooling in a pulsed DC mode of AlSiTi conductors on thermal and CVD oxides is investigated. A novel measurement technique is described for direct monitoring of transient temperature changes. The rise and fall times for Joule heating are experimentally measured. The self-heating and relaxation values for different isolation layers is discussed.
Keywords :
Conductors; Cooling; Current density; Degradation; Electrical resistance measurement; Plasma temperature; Pulse measurements; Resistance heating; Temperature measurement; Temperature sensors;
Conference_Titel :
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location :
Berlin, Germany
