Title :
1998 IEEE International SOI Conference Proceedings (Cat No.98CH36199)
Abstract :
The following topics were dealt with: SOI materials development; SOI devices; SOI circuit development; reliability and applications
Keywords :
SIMOX; monolithic integrated circuits; reliability; semiconductor devices; semiconductor technology; silicon-on-insulator; CMOS; SIMOX; SOI circuit development; SOI devices; SOI materials development; reliability;
Conference_Titel :
SOI Conference, 1998. Proceedings., 1998 IEEE International
Conference_Location :
Stuart, FL, USA
Print_ISBN :
0-7803-4500-2
DOI :
10.1109/SOI.1998.723039
