The Effect of Thin Oxide Layers on Shallow Junction Formation

Author

Stolk, P.A. ; Schmitz, J. ; Cubaynes, F.N. ; van Brandenburg, A.C.M.C. ; van Berkum, J.G.M. ; van de Wijgert, W.G. ; Roozeboom, F.

Author_Institution

Philips Research Laboratories, Eindhoven, The Netherlands

Volume

fYear

1999

fDate

13-15 Sept. 1999

Firstpage

428

Lastpage

431

Keywords

Electric resistance; Etching; Fabrication; Furnaces; Implants; Oxidation; Rapid thermal annealing; Reproducibility of results; Strontium;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1999. Proceeding of the 29th European

Conference_Location

Leuven, Belgium

Print_ISBN

2-86332-245-1

Type

Filename

1505531

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